TiN及TiSiN涂层在海水环境下的摩擦学行为研究

Tribological Behavior of TiN and TiSiN Coatings in Seawater

目的对比研究海水环境下Ti N及Ti Si N涂层与Al2O3对磨的摩擦磨损行为。方法采用多弧离子镀技术在316L不锈钢及单晶硅片上制备Ti N及Ti Si N涂层。利用场发射扫描电子显微镜(SEM)、X射线衍射仪(XRD)及X射线光电子能谱仪(XPS)分析了涂层的截面形貌及化学组织成分。选择纳米压痕仪测量了Ti N及Ti Si N涂层的硬度及弹性模量,使用UMT-3往复式摩擦试验机研究了人工模拟海水环境下Al2O3与Ti N及Ti Si N涂层对磨后的摩擦磨损行为,并采用扫描电镜(SEM)、电子能谱(EDS)及表面轮廓仪来深入分析了磨痕的摩擦磨损情况。结果研究表明,Ti N涂层的硬度为32.5 GPa,当Si元素掺入涂层以后,Ti Si N涂层的硬度提高到了37 GPa。同时,较之于Ti N涂层,Ti Si N涂层的腐蚀电流密度下降了一个数量级。在摩擦实验中,Ti N涂层的摩擦系数和磨损率分别为0.35和5.21×10-6 mm3/(N·m),而Ti Si N涂层的摩擦系数和磨损率均有明显下降,分别为0.24和1.96×10-6 mm3/(N·m)。结论 Si元素掺杂后能显著提高Ti N涂层在海水环境下的摩擦学性能,主要归因于结构的致密,硬度、韧性、抗腐蚀性的提高及润滑相的形成。

The work aims to compare friction and wear behavior of TiN and TiSiN coatings sliding against Al2O3 in seawater. TiN and TiSiN coatings were fabricated on 316 L stainless steel and monocrystalline silicon wafer by adopting cathodic arc ion plating technique. Cross-sectional morphology and chemical composition of the coatings were analyzed with SEM, XRD and XPS. Hardness and elasticity modulus of the TiN and TiSiN coatings were measured with nano-indentor. The friction and wear behavior of TiN and TiSiN coatings sliding against Al2 O3 in simulated seawater was studied with UMT-3 reciprocating friction testing machine. Friction and wear conditions of grinding cracks were thoroughly analyzed with SEM, EDS and a surface profiler. Hardness of TiN coating was 32.5 GPa. After silicon was doped, hardness of the TiSiN coating was up to 37 GPa. Meanwhile,, corrosion current density of TiSiN coating decreased by one order of magnitude compared to TiN coating. In the frictional experiment, friction coefficient and wear rate of the TiN coating was 0.35 and 5.21×10-6 mm^3/（N·m）, respectively. In contrast, friction coefficient and wear rate of the TiSiN coating decreased significantly to 0.24 and 1.96×10-6 mm^3/（N·m）, respectively. Tribological properties of the TiN coating are obviously improved by silicon doping due to dense structure, improvement of hardness, toughness and corrosion resistance, and formation of lubrication phase.