基于微电极结构的介质阻挡放电特性参数的仿真计算

Mechanisms of Microcavity Dielectric Barrier Discharge:A Simulation and Experimental Study

为了深入研究微腔介质阻挡放电(MDBD)的放电机理与放电参量的演化规律,搭建了基于介质板表面网格微结构电极装置的实验平台,并在深入分析其放电机理和实验结果的基础上建立了MDBD等效电路,建立了基于基尔霍夫电压方程,Boltzmann方程和电子连续性方程的仿真模型,并通过Matlab/Simulink和BOLSIG+软件联立求解,得到了MDBD伏安特性曲线、气隙电压、介质表面电压、电子密度和电子温度等特性参量的变化规律,并分析了电子平均能量与约化场强的对应关系。结果表明:MDBD气隙电压和介质表面电压在气隙击穿后基本维持不变,电子温度和电子密度与放电电流的变化规律一致,电子温度最高值约为3.0 eV,平均值约为1.6 eV,电子平均能量约为1.2 eV。

The micro-cavity dielectric barrier discharge （ MDBD） was mathematically modeled with equivalent circuit,theoretically analyzed,numerically simulated by solving Kirchhoff,Boltzmann and electronic continuity equa-tions with Matlab/Simulink and BOLSIG＋software,and experimentally evaluated with the lab-built setup.The im-pact of the operation voltage and MDBD geometry on the time evolution of the plasma properties：including the volta-ges of air-gap and dielectric surface,electron density,electron temperature,average electron energy,and reduction field,was investigated.The simulated results included the following：i） the time-evolution of discharge voltage and current,ii） the voltages,across the air-gap and on dielectric surface,basically remain unchanged after the air-gap breakdown;iii） the time evolution of electron temperature and electron density resemble to that of the discharge cur-rent;and iv） the average e-temperature is 1.6 eV,peaking at 3.0 eV,and an average e-energy is 1.2 eV.The simu-lated and measured U-I characteristics were in good agreement.