摘要
为了深入研究微腔介质阻挡放电(MDBD)的放电机理与放电参量的演化规律,搭建了基于介质板表面网格微结构电极装置的实验平台,并在深入分析其放电机理和实验结果的基础上建立了MDBD等效电路,建立了基于基尔霍夫电压方程,Boltzmann方程和电子连续性方程的仿真模型,并通过Matlab/Simulink和BOLSIG+软件联立求解,得到了MDBD伏安特性曲线、气隙电压、介质表面电压、电子密度和电子温度等特性参量的变化规律,并分析了电子平均能量与约化场强的对应关系。结果表明:MDBD气隙电压和介质表面电压在气隙击穿后基本维持不变,电子温度和电子密度与放电电流的变化规律一致,电子温度最高值约为3.0 eV,平均值约为1.6 eV,电子平均能量约为1.2 eV。
The micro-cavity dielectric barrier discharge ( MDBD) was mathematically modeled with equivalent circuit,theoretically analyzed,numerically simulated by solving Kirchhoff,Boltzmann and electronic continuity equa-tions with Matlab/Simulink and BOLSIG+software,and experimentally evaluated with the lab-built setup.The im-pact of the operation voltage and MDBD geometry on the time evolution of the plasma properties:including the volta-ges of air-gap and dielectric surface,electron density,electron temperature,average electron energy,and reduction field,was investigated.The simulated results included the following:i) the time-evolution of discharge voltage and current,ii) the voltages,across the air-gap and on dielectric surface,basically remain unchanged after the air-gap breakdown;iii) the time evolution of electron temperature and electron density resemble to that of the discharge cur-rent;and iv) the average e-temperature is 1.6 eV,peaking at 3.0 eV,and an average e-energy is 1.2 eV.The simu-lated and measured U-I characteristics were in good agreement.
出处
《真空科学与技术学报》
CSCD
北大核心
2017年第10期1008-1013,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金"基于微电极结构的介质阻挡放电及等离子体三极管研究"(U1204506)
国家自然科学基金"发射光谱解析常压均匀放电等离子体处理服用丙纶表面的反应机理研究"(11405044)
关键词
微腔
介质阻挡放电
气隙电压
电子密度
电子温度
Microcavity
Dielectric barrier discharge
Air gap voltage
Electron density
Electron temperature