多电极石英力敏谐振器的力敏特性及稳定性研究

Researchon Force Sensitivity and Stability of Multi-electrode Quartz Force Sensitive Resonator

在分析石英晶片受力作用时晶片内应力分布的基础上,设计了一种多电极新型石英力敏谐振器及信号处理电路。在室温及大气状态下对设计的力敏谐振器同时进行激励时,各对电极对应的谐振器的力-频特性线性度及频率稳定性良好。将各谐振器的频率互作差频,再作叠加处理后,输出的频率信号的力-频系数达到2 951.8Hz/N,线性相关度为0.999 7,频率稳定性可达10-10数量级。

A new multi-electrode quartz resonator and signal processing circuit is designed on the basis of analyzing the stress distribution in the wafer when the quartz wafer is subjected to force.When a plurality of resonators are simultaneously excited at room temperature and atmospheric conditions,the resonator＇s linearity of force-frequency characteristics and frequency stability corresponding to the respective electrodes are excellent.After the interaction frequency difference and superposition processing to the frequency of each resonator,the force-frequency coefficient of the output frequency signal can reach 2 951.8 Hz/N,the linear correlation is 0.999 7,and the frequency stability can reach the magnitude of 10^-10.