大功率射频激光电源功率的控制研究

High power radio frequency laser power control research

大功率射频激光器的输出功率存在较高的动态性和滞后性,无法采用有效的数学模型描述输出功率的控制过程。传统PID射频激光电源功率控制器,存在响应效率低以及抗干扰性差的问题。因此,设计一种基于Fuzzy-PID控制技术的大功率射频激光电源功率控制器,其基于输入控制指令形成不同占空比的PWM波,控制射频激光电源的功率,确保激光器程序连续/脉冲可调状态。设计了大功率射频激光电源功率控制器结构,对其硬件的各组成部分进行设计,软件部分分析Fuzzy-PID控制器基本原理,采用Fuzzy-PID控制技术完成激光输出功率的反馈控制,稳定激光输出功率,同时设计射频电源调制器的串口通讯界面以及Fuzzy-PID子程序的设计。实验结果说明,所设计控制器具有较高的响应效率和抗干扰性。

The output power of high power radio frequenc（ RF） laser is high dynamic and lag,which cannot be described through effective mathematical model. Traditional PID RF laser power supply power controller is unable to effectively solve this problem,and has the defects that low efficiency and poor anti-interference. Therefore,this paper proposed a high power RF laser power supply controller based on Fuzzy-PID control technology. It controls power of RF laser power supply based on the different duty cycles of PWM wave formed by input control instructions,to ensure the continuous/pulse adjustable situation of laser procedures. Design the structure of high power laser power supply of the radio frequency power controller,to design for each component of its hardware,while the software part analyzes the basic principle of Fuzzy-PID controller. Using Fuzzy-PID control technology to complete the feedback control of laser power output and the stable laser output power. At the same time,design the serial communication interface of RF power modulator and the subroutine of the Fuzzy-PID. Experimental results indicate that the designed controller has high response speed and anti-interference capacity.