摘要
本文通过对失效样本的外观检查、有机溶剂去除保护层、万用表逐圈检查初步定位失效部位和40倍显微镜放大检查的4个步骤,成功准确地找到了金属膜电阻的失效部位。并从电气角度分析了金属膜电阻的失效过程,总结了提高金属膜电阻的可靠性的方法,为金属膜电阻的失效分析提供了一种思路和解决方案。
Through the failure sample appearance inspection, the organic solvent disrupts the protective layer, preliminary positioning failure parts by muhimeter, checking by examination under a 20-power microscope, This paper finds the failure site of Metal Oxidation Resistance successfully and accurately. This paper analyzes the failure process of Metal Oxidation Resistance in the perspective of electrical, summarizes the method of improving the reliability of Metal Oxidation Resistance. And providing a new thinking and solution for Metal Oxidation Resistance Failure Anslysis.
出处
《中国集成电路》
2017年第11期69-72,共4页
China lntegrated Circuit
关键词
金属氧化膜
电阻
失效分析
Metal Oxidation
Resistance
Failure Analysis
