主轴刚度对超精密阵列微结构加工质量的影响规律研究

Study on the influence regularity of spindle stiffness on the machining quality of array micro structure ultra precision

精密机械与精密仪器的表面常伴有阵列微结构,要求尺寸精度达亚微米级,表面粗糙度达纳米级,用快刀伺服加工辊筒表面上阵列微结构是一种高效加工方式,但加工质量的控制较难。通过分析超精密阵列微结构的特征,权释压电陶瓷驱动的快刀伺服器用于阵列微结构加工的优点,在设计和组建快刀伺服系统后,探索切削深度、主轴刚度等因素对加工精度的影响规律,检测工件的尺寸精度和表面粗糙度等,探索出有利于提高加工质量的工艺方法,为获得超精密阵列微结构提供工艺参数。

The surface of precision machinery and precision instrument is often accompanied by the array micro-structure,which needs that the size precision achieves the submicron degree and the surface roughness achieves the nano degree. Using the fast tools servo（ FTS） to machine the array micro structure of roller surface is an effective way, but the processing quality is difficult to control.Through analyzing the characteristics of array micro-structure based on the ultra precision.The processing advantages on FTS driven by the piezoelectric ceramic is explained to machining the array micro-structure.After designing and assembling FTS.The influence regularity of machining accuracy is explored on some factors such as cutting depth, spindle stiffness etc.The dimension accuracy and the surface roughness is detected, and it explores the processing method to improve the machining quality.All of those are provided for the process parameters in order to obtain the array micro-structures of ultra precision.