248nm光刻胶用丙烯酸酯共聚物的合成与性能

Synthesis of Methacrylic Copolymers Applied in 248nm Photoresist

以对乙酰氧基苯乙烯(ASM)、丙烯酸叔丁酯(TBA)、丙烯酸四氢呋喃酯(TA)和2-甲基-2-金刚烷基甲基丙烯酸酯(MAM)为单体,偶氮二异丁腈(AIBN)为引发剂,通过自由基聚合制备了不同MAM含量的丙烯酸酯类共聚物P(ASMco-TBA-co-TA-co-MAM)(PATTM),加入一定量的甲醇钠和甲醇进行醇解,制得丙烯酸酯类共聚物PATTM-A。用傅里叶变换红外光谱、核磁共振氢谱、凝胶渗透色谱、差示扫描量热法等方法对共聚物PATTM和PATTM-A的结构与性能进行了表征;以PATTM-A为基体树脂配制了光刻胶,利用扫描电子显微镜测试了光刻胶分辨率。结果表明,随着MAM含量升高,PATTM-A的相对分子质量下降,玻璃化转变温度升高,耐碱性增强,所制备的光刻胶分辨率可达0.5μm。

series of methacrylic copolymer P（ASM-co-TBA-co-TA-co-MAM） （PATTM） with different ratios of 2-methyl-2-adamantyl methacrylate （MAM） were synthesized by reaction of p-acetoxystyrene （ASM）, tert-butyl acrylate （TBA）, tetrahydrofuffuryl acrylate（TA）and 2-methyl-2-adamantyl methacrylate （MAM） via free radical copolymerization, then a photosensitive copolymer PATTM-A was prepared by reaction of PATTM and sodium methoxide solution. Fourier transform infrared spectroscopy （FT-IR）, nuclear magnetic resonance spectroscopy （1H-NM1R）, gel permeation chromatography （GPC） and differential scanning calorimetry （DSC） were used to characterize the structure and properties of copolymers. The results show that the molecular weight decreases while the glass transition temperature of copolymer increases with increase of the MAM content. Photoresists based on PATTM-A were prepared, for which the resolution can reach 0.5μm, hardness and adhesion are good.