钛基底纳米金刚石场发射阴极的氢处理工艺研究（英文）

Hydrogen Treatment Technology of Ti-based Nano-Diamond Field Emission Cathode

利用电泳沉积法制备了钛基底纳米金刚石的场发射阴极涂层,热处理后对其进行了氢等离子体工艺处理,然后对样品进行微观表征与场发射特性以及发光效果的测试。研究表明,H^+的吸附作用和H^+的刻蚀作用共同影响着金刚石涂层表面的形貌,氢处理作用不足则达不到效果,过强则会导致对金刚石涂层刻蚀过度,导致涂层的场发射性能以及发光效果变差,适当的氢处理有助于提高场发射性能和发光效果,最后探讨了钛基底纳米金刚石涂层氢处理的场发射机理,解释了发光效果差异的成因。

The field emission cathode coating of nano-diamond on titanium substrate was prepared by electrophoretic deposition, the hydrogen plasma process was carried out after heat treatment, and then the microstructure, field emission properties and the luminescence performance of the samples were characterized. The results show that the adsorption of H~＋ and the etching of H~＋ collectively affect the morphology of diamond coating. Deficient hydrogen treatment can＇t reach the requirement and excessive hydrogen treatment can lead to serious etching for the diamond coating, resulting in worse field emission properties of the coating and luminescence effect. The appropriate hydrogen treatment is helpful to improve the field emission properties and luminescence effect. Finally, the field emission mechanism of nano-diamond coating on titanium substrate was discussed, and the reasons of luminescence effect difference were explained.