基于C8051F500微波电源控制器的研制

Development of Microwave Power Controller based on C8051F500

微波电源是等离子体设备的核心,它的工况直接决定了等离子体的各项参数。针对微波电源设计实现了基于C8051F500的嵌入式控制器,提供了远程控制与手操器控制两种模式,用户可以借助上位机对微波电源进行实时监控。考虑到拓展应用,提供了CAN总线接口,为将来接入其他低温等离子设备系统提供了便利。

Microwave power, of which working conditions determine all parameters of the plasma, is the core of plasma devices. In this paper, an embedded controller is designed for microwave power based on C8051F500, which provides both remote and hand-control modes, so that microwave power can be controlled through HMI in supervisory computer. Considering the extended application, the CAN bus is provided, which is convenient for future access to other low-temperature plasma equipment systems.