基于温漂补偿模型的原子力图像重构

AFM image reconstruction based on drift correlation model

针对原子力显微镜(AFM)扫描样品时因受系统温漂影响导致扫描图像失真的问题,提出一种基于温漂补偿模型的AFM图像重构方法。利用AFM图像在快速扫描方向上精度相对较高的特点,关联同一样本的两个不同角度的扫描图像,定义偏移矢量,建立起温漂模型。通过实验仿真验证了该方法有效性,在此基础上校正AFM图像,实验结果表明,该方法能有效降低系统温漂的影响,提高AFM图像质量。

Aiming at the problem of scanned images distortion resulted from system drift when using atomic force microscope to scan,an approach of AFM image reconstruction based on drift correlation model was presented.The compensation approach combined the images of the same sample region scanned at two different angles,established the drift model with usage of the characteristics of high accuracy on fast scanning direction,defined the offset vector,and performed the reconstruction of drift images.The approach was verified to be effective by an experiment simulation and then it was used to the correction of AFM images on the basis of above processes.The experiment was carried out to illustrate that the approach can effectively eliminate the influence caused by system drift and can improve AFM images accuracy effectively.