基于视觉显著性的LED晶圆自动提取系统

LED wafer automatic extraction system based on visual saliency

晶圆目标提取是晶粒计数系统的重要处理环节,是确保晶粒计数准确度的前提条件。目前主要应用阈值化方法将晶圆目标从背景中提取出来,由于离型纸固有因素影响,造成成像灰度不均匀,严重影响晶圆目标范围的有效识别。系统通过对光源的闭环控制,取得合适亮度的晶圆图像后,在Harris轮廓点的外围区域确定边界,通过内部区域对边界的连接度来检测区域中的晶圆视觉显著性目标。试验证明,该系统能精确地在离型纸背景上有效提取晶圆目标。

LED wafer target detection is an important part of the grain counting system, and it is a prerequisite for ensuring the accuracy of grain counting. The threshold method is applied to extract the wafer target from the background of the release paper at present. Due to the inherent factors of the release paper, the gray scale of the imaging is not uniform, which seriously affected the recognition of the wafer target range. The system can obtain the appropriate brightness of the wafer image through the control mode of the closed-loop light source. The visual saliency of the wafer target in the internal area is further detected by the connection de-gree of the inner region to the boundary based on the boundary of the peripheral area of the Harris contour point. The experiments show that the system can obtain clean and uniform saliency maps of the wafers from the background of the release paper.