共面波导表面状态对微波性能影响分析

Analysis on Influence of Coplanar Waveguide Surface State on Microwave Performance

针对共面波导表面状态对微波性能影响进行了分析,应用保角变换法定量给出了共面波导金属厚度与有效介电常数、特征阻抗、损耗修正表达式。测量了工程中常用的不同工艺制作的共面波导传输线导体厚度、表面粗糙度等参数。采用仿真软件模拟不同导体厚度、不同导体表面粗糙度对微波传输性能的影响。在追求低传输损耗的工程应用中,要考虑共面波导导体厚度、表面粗糙度等表面状态的影响,选择合适的工艺手段和合理的工艺精度来保证传输线的微波性能。

In this paper,the influence of coplanar waveguide（CPW） surface state on microwave performance is analyzed,and the conformal mapping method is utilized to present the expression of CPW metal thickness,dielectric constant,characteristic impedance and insertion loss.The conductor thickness and surface roughness of the CPW transmission line are investigated under various fabrication procedures.The EM simulation software is used to study the influence of conductor thickness and surface roughness on microwave performances.In pursuit of lower transmission loss and improving microwave performance,the metal thickness and surface roughness of CPW should be considered,and the microwave performance of transmission line should be ensured by choosing appropriate fabrication techniques.