超光滑表面的加工、表征和功能

Generation, Characterization and Function of Super-smooth Surfaces

超精密加工的目标是通过表面质量控制获得预定的表面功能。一定的加工过程产生相应的表面特征 ,而表面特征在很大程度上又决定着表面的实际功能。为了通过预先设计及加工控制获得要求的功能表面 ,必须对超光滑表面的加工、表征。

The ultra precision machining aims at obtaining the designed surface functions through the surface quality controlling. In the production of workpieces, each stage of the machining and treatment process results in certain surface textures. In the meantime, the surface texture layer determines the functionality of the final product to a considerable extent. It's in need of wholly comprehending the ultra precision machining surface and relevant factors such as surface generation, surface characterization, surface function and relationship between them, so as to obtain the desire surface by means of designing and controlling the process in advance.