槽型空心阴极放电中槽底阴极面的电子发射对放电的影响

Influence of electron emission from the bottom cathode on the characteristics of a slotted hollow cathode discharge

运用粒子和流体组合模型理论研究了槽型空心阴极放电中槽底阴极面上二次电子发射对放电等离子体特性、电离特性及阴极溅射的影响 .研究表明 ,从槽底阴极面发射的电子在进入负辉区后 ,可以形成振荡电子 ,因而具有增强电离的作用 .根据各阴极面上的离子的空间分布可以推知槽底附近的阴极面上的溅射较强 。

Based on a hybrid model combining the fluid description of slow electrons and positive ions with a particle simulation of fast electrons using a Monte Carlo technique, the characteristics of ionization and cathode sputtering of a slotted hollow cathode discharge are investigated. It is shown that electrons emitted from the surface of the bottom cathode can oscillate between opposite cathode surfaces and enhancehe the bulk ionization. According to the ion spatial distribution on the cathode surface, it is deduced that the cathode sputtering is more severe around the bottom. This can well interpret the profile variation of the slotted cathode in the existing experimental observations.