聚焦离子束(FIB)中的离子光学问题

Some ion optics topics in FIB

本文简要讨论了聚焦离子束中的离子光学问题 ,包括液态金属离子源的发射机制和发射特性 ,如虚源、角电流强度、能量分散、伏安特性、束流起伏、聚焦限制、离子束中的化学成分及源的寿命。讨论了离子光学柱体的组成与特征 ,束流一束径关系 ,束中电流密度分布 ,以及空间电荷效应等。

Some ion optics topics, such as LMIS' emission characteristics, including virture source, angular current, energy broadening, I V characteristics, current fluctuation, focusing limit ,etc, and ion optics column, including its constituent, beam current diameter relation, current density distribution and space charge effects, etc, have been discussed in this paper.The history of electrostatic lens and its importance have been also reviewed.