互补的微分析方法—扫描电子显微术和扫描探针显微术

SEM and SPM complementary microanalysis methods

本文介绍扫描电子显微术 (SEM)和扫描探针显微术 (SPM)这两种最常用的微分析方法的新进展。简述了它们各自的构成、工作原理。

Recent developments of scanning electron microscopy (SEM) and scanning probe microscopy (SPM) were reviewed as commonly used microanalysis methods. Their instrumentation, working principles and complementary characteristics in the microstructure investigations were briefly discussed.