Cr_xTi_yO_z结构与其摩擦学性能相关性研究

Correlation between Cr_xTi_yO_z Structure and Its Tribological Properties

目的通过研究表明与Magnéli相相似的Ti(n-2)Cr2O(2n-1)相当6≤n≤9时,在宽温域环境下具有优异的摩擦学性能,并深入探索这种双金属氧化物结构与力学性能和摩擦学性能之间的关系。方法利用多弧离子镀技术设计制备了不同CrxTiyOz结构的双金属氧化物薄膜,研究了退火处理前后,不同结构对薄膜力学性能和摩擦学性能的影响。结果随着Ti含量的降低,原始薄膜中大颗粒的数量和尺寸减少,膜基结合力先增加后降低,摩擦系数变化幅度不明显,约为0.3,磨损率为3×10-8 mm3/(N·m)。退火处理后,薄膜的结晶度提高,随着Ti含量的降低,薄膜硬度增大,膜基结合力提高,摩擦系数和磨损率逐渐减小。结论退火处理后的薄膜如Ti含量过高,会生成Cr2Ti4O11、Cr Ti O3和Cr_2O_3复合相,从而结构变疏松,力学性能和摩擦学性能变差。

Studies show that Ti（n-2）Cr2 O（2 n-1） phase which was similar to Magnéli phase exhibits excellent tribological properties if 6≤n≤9. In order to deeply explore the relationship between structure and mechanical and tribological properties of double metal oxide, double metal oxide films with different CrxTiyOz structures were designed and fabricated by adopting the technology of multi-arc ion plating. Effects of different structures on mechanical and tribological properties of the as-deposited and annealed films were investigated. With the decrease of the Ti content, quantity and size of large particles in original film decreased, film-substrate cohesion first increased and then decreased, friction coefficient changed slightly to nearly 0.3 and wear rate was 3×10-8 mm3/（N·m）. Crystallinity of the films increased after annealing. With the decreased of Ti content, film hardness increased, the film-substrate cohesion increased, and both the friction coefficient and wear rate decreased gradually. Cr2Ti4O11, CrTiO3 and Cr2O3 composite phases were produced if the annealed films had high Ti content, thus leading to loosen film structure, and poor mechanical and tribological properties.