光谱共聚焦等高面测量法研究

Study on Spectral Confocal Contour Plane Measurement Method

通过对机械测量球头在金属表面测量与光谱共聚焦测量数据在非光滑表面数字误差的对比,结合机械测量中的的实际情况,综合运用等高面和数理统计的相关理论知识对两者测量进行了研究和探讨,发现光谱共聚焦数学测量面的建立是与机械测量溯源的关键,提出了建立光谱共聚焦等高面的模式,并运用数学模型的方式研究了在非光滑表面测量的模式,为光谱共聚焦在机械领域的测量提供了可借鉴的理论依据。

This research compared the data of two methods in non-smooth metal surface by spectral confocal contour plane measurement method versus ball head based mechanical measurement method. Based on contours theory and mathematical statistics, we found that modeling mechanical measurement surface with spectral confocal mathematic measurement is the key to contrast source location. This paper proposed the method to establish spectral confocal contour plane and verified the feasibility of measurement on non-smooth metal surface using mathematical modelling. This provides a theoretical basis for the measurement of spectral confocal in the field of mechanical measurement.