改良西门子法生产多晶硅的还原工艺研究

Study on reduction process in polysilicon production using modified Siemens process

改进多晶硅还原炉生产工艺,操作压力由0.05~0.1 MPa提高到0.5 MPa,控制合适的温度、供料量和配比,获得了综合性能优良的生产工艺。综合指标最优的实验炉次,生产周期由200 h缩短到100 h,电单耗由150 k Wh/kg降低到73.8 k Wh/kg;产品表观质量和纯度也得到显著提升。

The production process of the reduction furnace in polysilicon production is renovated through increasing the operating pressure from 0. 05 - 0. 1 MPa to 0. 5 MPa,and controlling appropriate temperature,feed rate of materials and proportion among materials. In an experimental furnace batch with the optimal comprehensive performance,the production period shortens from 200 hours to 100 hours,the power consumption per kilogram polysilicon reduces from 150 kWh to 73. 8 kWh,and the apparent quality and purity of polysilicon are also significantly improved.