摘要
为了克服MEMS吸附机构不易微小化的缺点,采用形状记忆合金(SMA)驱动的刚弹性耦合偏动式负压吸附机构模型,该吸附机构的多腔体负压模型包含SMA弹性体板力学模型、理想状态下的密闭腔气体负压模型等环节,质量轻、结构简单,产生负压较快,并具有一定的吸附能力,可以作为MEMS的吸附机构,也为微小负压吸附机构的后续研究奠定了一定的理论基础。
Suction mechanisms of MEMS are not easy to miniaturize. To overcome the shortcoming, a rigid coupled partial dynamic adsorption mechanism model actuated by shape memory alloy （ SMA） was adopted. The multi-cavity negative pres-sure model of the adsorption mechanism includes the mechanical model of SMA elastomer plate and the negative pressure model of airtight cavity in the ideal state,light quality and simple structure generated quickly and could be used as an ad-sorption mechanism for MEMS, which has laid a theoretical foundation for the following study of micro-negative pressure ad-sorption mechanism.
作者
代芳
DAI Fang(Jiangxi Province Key Laboratory of Precision Drive and Control;School of Mechanical ＆ Electrical Engineering,Nanchang Institute of Technology,Nanchang 330099,China)
出处
《南昌工程学院学报》
CAS
2017年第6期100-104,共5页
Journal of Nanchang Institute of Technology
基金
南昌工程学院青年基金科技项目(2014KJ014)
关键词
形状记忆合金
驱动
吸附机构
负压
模型
shape memory alloy （SMA）
actuation
adsorption mechanism
negative pressure
model
