二维光电水平倾角测量系统

A two-dimensional photoelectric level inclination measuring system

针对高端装备制造中对大尺度机床误差测量与补偿的要求,本文基于光学自准直原理和液体表面反射原理,研制了一种二维光电水平倾角测量系统以实现对机床滚转角和俯仰角的测量。该系统使用半导体激光器发射激光,经光学自准直系统于待测硅油表面将被测倾角放大二倍。然后,由位置敏感探测器感测光斑位置变化,输出包含角度信息的光电流信号,并由低噪声四路同步微弱信号处理电路进行相同倍数的放大以减小误差。最终,由高速采集卡进行数据采集,经均值滤波、曲线拟合、解算处理后将其转化为倾角信息,从而实现二维角度测量。在光学平台进行了对比实验,结果表明:测量系统在-10~10mm/m(约为-2 000″~2 000″)量程内,角度测量误差小于±0.050mm/m(约为±10″),线性度优于0.25%,满足大尺度机床二维水平倾角检测对大量程、高精度、高稳定性的要求。

For error measurement and error compensation of large-scale machine tools in high-end equipment manufacture,a two-dimensional photoelectric level inclination measuring system was established based on the principle of optical auto-collimation and liquid surface reflection to measure the roll angle and the pitch angle of a machine tool.Firstly,a laser diode was used as a source of the system,and the inclination was doubled on the surface of the silicone oil through an optical auto-collimation system.Then,spot position changes were detected by aposition sensitive detector,the photoelectric signal containing angle information was output and the four low noise I-V conversion and consistent amplifying circuits were used to amplify signals and to reduce errors.Finally,a high-speed data acquisition system was used to acquire data and to convert them into inclination information by mean filtering,curve fitting and solution processing to accomplish two-dimensional inclination measuriement.A contrast experiment was performed on an optical platform.The results show that the angle errors areless than ±0.050 mm/m（about±10″）and the linearity exceeds 0.25% within the system measuring range of-10-10 mm/m（about-2 000″-2 000″）.It concludes that the system meets the requirements of large range,high precision and high stability and achieves two-dimensional level inclination measurement of large-scale machine tools rapidly.