薄膜瞬态温度传感器的制备及性能研究

Fabrication and performance analysis of thin film transient temperature sensor

针对普通温度传感器存在响应时间长、无法快速测量瞬态温度以及薄膜热电偶引线困难的技术难题,研制了一种响应速度快、测量精度高、引线方便的薄膜瞬态温度传感器。采用直流脉冲磁控溅射技术,在嵌入Ni Cr-Ni Si平行电极丝的陶瓷基体端面依次沉积Ni Si功能薄膜和Si O2绝缘保护薄膜。利用自行研制的静态标定系统对薄膜传感器的静态性能进行了研究,结果表明所研制传感器在50~400℃范围内具有良好的线性和热稳定性,塞贝克系数为41.2μV/℃,非线性误差不超过0.05%,改变Ni Si薄膜的厚度对传感器的塞贝克系数影响很小。利用ANSYS有限元仿真和动态标定实验对薄膜传感器的动态性能进行了研究,结果表明所研制传感器的响应时间为μs级,时间常数随着Ni Si热接点薄膜厚度的增加而增大,改变激光脉冲能量对传感器时间常数的影响很小。利用温度检定炉对薄膜传感器进行了测温试验研究,结果表明所研制传感器能够快速响应温度的变化,可为瞬态温度的测试提供有效的方法和技术途径。

In regard to the technical problems of ordinary temperature sensors with the inadequacy of long response time to rapidly measure transient temperature and the difficulty to lead wires for thin film thermocouple, a thin film transient temperature sensor is developed with quick response time, high measurement accuracy and convenient to lead wires. The DC pulsed magnetron sputtering technology is applied to deposit NiSi functional thin film and SiO2 insulating thin film on the surface of ceramic substrate embedded with NiCr-NiSi parallel electrode wires. The static performance of developed sensor is studied by utilizing a self-developed static calibration system. Experimental results show that developed sensor has good linearity and thermal stability in the range of 50 to 400℃. The seebeck coefficient is 41.2 μV/℃ with a nonlinear error less than 0.05% , which remains stable with the change of NiSi film thickness. The dynamic performance of developed sensor is studied by using ANSYS finite element simulation and dynamic calibration experiments, which has a microsecond response time increased with the increasing of NiSi film thickness. In addition, the response time of developed sensor has little effect with the change of energy of laser pulse. The temperature test of thin film transient temperature is conducted through utilizing the temperature calibration furnace. The results show that the sensor can quickly respond to temperature changes and the developed sensor can provide effective methods and technical approaches for transient temperature test.