提升磨料水射流抛光去除效率的参数研究

Study on parameters of improving fluid jet polishing removal efficiency

具有独特优势的磨粒水射流抛光技术,由于去除效率低,在加工超精密光学元件中的应用受到了一定的限制。本研究通过实验和仿真,分析了喷嘴直径和射流压力对去除函数、去除效率和确定性修形加工的影响。实验结果表明:喷嘴直径在一定尺寸范围内增加,可以有效地提升去除效率,超过一定尺寸后,去除效率增加减慢,去除函数的宽度变化要远大于喷嘴直径的变化;随射流压力增大,去除函数深度呈指数增加,去除函数轮廓由W形转变为双W形。通过建立回转函数来模拟偏心回转射流的方法,验证了变形后的去除函数在确定性抛光加工中具有很好的适用性,并且该方法可以用在采用垂直射流直接进行超精密表面的确定性抛光加工上。

The application of fluid jet polishing(FJP)technology,who has unique advantage in machining ultra precision optical elements,is limited due to low removal efficiency.The effects of nozzle diameter and jet pressure on removal function,removal efficiency and deterministic modification are analyzed by experiments and simulations.It is experimentally ascertained that the removal efficiency increases with the increase of nozzle diameter in a certain size range,and that the removal efficiency increases slower when nozzle diameter increases beyond the range.The width change of the removal function is much larger than that of the nozzle diameter.The depth of the removal function increases exponentially with the increase of the jet pressure,and the profile of the removal function changes from W shape to double W shape.By establishing the rotation function to simulate the eccentric rotating jet method,it is proved that the removal function after deformation has good applicability in deterministic polishing process and the method can be directly applied to the deterministic polishing of the ultra precision surface using a vertical jet.