高压SOI工艺SCR ESD保护器件研究

Study on SCR on SOI for High Voltage ESD Protection

针对ESD保护器件SCR的维持电压和触发电压难以调整的问题,设计了一种SCR版图形式,这种新型的SCR版图形式可以将维持电压和触发电压进行最优化的调整,同时不改变原有的高压工艺的特点。从而解决了在高压ESD保护领域,使用SCR做ESD保护器件容易引入闩锁效应的问题,是目前高压ESD保护领域较好的解决方案。

In order to solve the problem that it is hard to adjust the sustaining voltage and the trigger voltage of SCR, a novel layout design was proposed which allows optimization of the sus- taining voltage and the trigger voltage while maintaining SCR＇s high voltage characteristics. This latch-up free SCR design could be a preferred technological solution for high voltage ESD protection.