大尺寸单晶金刚石制备的研究进展

Progress Research on Deposition of Large Size Single Crystal Diamond

单晶金刚石在电学,光学方面有着良好的应用前景,已经成为金刚石领域的研究焦点之一。本文论述了大尺寸单晶金刚石的制备方法、生长条件、研究现状以及存在的缺陷,概述了制备单晶金刚石过程中出现的问题并针对部分问题提出改善措施。

The unique properties of single crystal diamond （SCD） were stimulated the study of and search for its applications in many fields, including optics and electronics. In this article, the promising approaches to fabricating large size SCD were described while defects were presented simultaneously. Development status confirms the expectations thereby implying the feasibility of these methods of reaching required dimensions.