原位显微拉曼测温系统的设计及实现

Structural Design and Construction of Temperature Measurement System Based on In-Situ Microscopic Raman

拉曼光谱仪是一种常用的光学分析手段,目前国内市场上存在许多小型的便携式拉曼光谱仪,虽然操作简单,但光谱分辨率及探测范围有限。文章设计并搭建了一台具有显微原位测温功能的大型拉曼光谱仪系统,测试结果表明,系统能够探测的波数范围为-6 000~325cm-1、275~6 000cm-1,光谱分辨率可达到0.7cm-1。将其与已经商业化的便携式拉曼光纤探头对比,对标准样品硅片及其他样品的测试结果表明:该系统具有更高的信噪比及灵敏度,对激发光、杂散光的滤除效果更优,能够探测到样品的反斯托克斯拉曼信号,具有原位探测样品表面温度的能力。

Raman spectrometer is a commonly used optical analysis means,and there are many kinds of small portable Raman spectrometer in domestic market.Although the operation is simple,the spectral resolution and detection range are limited.In this paper a microscopic Raman spectrometer was designed and built,which can detect the temperature of the sample in suit.The results show that the wavenumber can be detected in the range of-6 000~325 cm-1 and 275~6 000 cm-1,and the spectral resolution can reach 0.7 cm-1.Compared with the commercially available portable Raman fiber probe,the test results of the standard sample silicon and other samples show that the prototype has better signal to noise ratio and a higher sensitivity,the filtering of excitation light and stray light is better.The system can detect the anti-Stokes Raman signal of the sample,and it has the ability to test the surface temperature of the sample in situ.