基于CCD的实时成像与微小尺寸测量系统的设计

Design of real-time imaging and micromagnitude measurement system based on CCD

设计了一种基于CCD的实时成像与微小尺寸测量系统,该系统由CCD摄像头、视频解码芯片、FPGA、USB芯片和上位机组成.用FPGA控制视频解码芯片获取CCD摄像头采集的光学信号,通过USB传给上位机,利用多线程技术实现控制命令的发送、图像数据的接收、处理和显示,以及微小尺寸的测量.结果表明:经过多次测量实验得到系统误差不超过3μm,满足测量精度要求;通过选用不同分辨率的CCD,可以实现不同精度的微小尺寸测量.此外还对双棱镜干涉实验所形成的干涉条纹间距进行了测量,验证了系统的功能.

A real-time imaging acquisition and micromagnitude measurement system based on CCD is proposed in this paper. The system is composed of a CCD camera, a video decoder chip, a FPGA,a USB chip and a host computer. FPGA first controls video decoder chip to obtain the optical signal acquired by the CCD camera, and then sends it to the host computer through USB interface. By using multithread technology, the host computer achieves the transmission of control commands, the processing and display of the image data and the measurement of microstructures. The results show that the system error is no more than 3 tim after repeated measuring experiments. Moreover, the system can achieve mieromagnitude measurement with different accuracy by using different CCD. Finalstem is ly, by measuring the distance between interference fringes formed by double-prism interference, the function of the sytestified