摘要
为阐明FESEM加速电压对样品表面形貌信息的影响,实验比较分析了在不同加速电压条件下,几种典型样品的电镜图片,并通过理论分析得出,加速电压越低所获取的样品表面形貌细节越丰富,但是图像的信噪比较差,图像在高倍率下容易显得模糊;加速电压越高获取的样品表面信息越少,但图像信噪比好,图像内部信息越多。
Scanning electron microscopy images of several kinds of typical samples have been acquired in order to well understand the effect of FESEM accelerating voltage on the surface morphology information. Results showed that the rich surface topography information of samples could be obtained from the lower accelerating voltage, but the poor signal noise ratio （SNR） and fuzzy images in high ratio would be made. However, the information inside images and SNR would be better when the higher accelerating voltage was carried out.
出处
《佳木斯大学学报（自然科学版）》
CAS
2018年第1期136-137,162,共3页
Journal of Jiamusi University：Natural Science Edition
关键词
场发射扫描电镜
加速电压
二次电子
形貌信息
field emission scanning electron microscope
accelerating voltage
secondary electron
morphology information
