集成电路用半导体材料智能制造应用研究

Research on Intelligent Manufacturing Application of Semiconductor Materials for Integrated Circuits

集成电路用半导体材料是集成电路、半导体器件制造的基础材料,是一种十分敏感的战略性资源.集成电路用半导体材料智能制造应用研究就是在电子级多晶硅生产线的基础上,针对智能制造在多晶硅生产、经营流程中的具体应用进行研究,构建一套全面的生产过程信息管理系统,具备高度数字化、可视化、模型化、集成化和智能化,实现各层面的业务协同,提高企业的预测预警能力,保证生产安全和环保,实现设备自动化、人员高效化、管理信息化。提高产品的稳定性,达到集成电路用电子级高纯多晶硅的稳定产出的目的,为国家集成电路产业原材料提供战略保障。

Semiconductor circuit is an integrated circuit, semiconductor device manufacturing base material, is a very sensitive strategic resources.Integrated circuit semiconductor materials intelligent manufacturing application research is through intelligent system, digital production line construction, build a comprehensive Production process information management system, with a high degree of digital, visualization, modeling, integration and intelligence, to achieve all levels of business collaboration,improve the enterprise＇s ability to predict early warning, to ensure production safety and environmental protection, equipment automation, personnel efficiency, management Informatization. Improve product stability, to achieve integrated circuit with electronic grade high purity polysilicon stable output of the purpose for the national integrated circuit industry to provide strategic protection of raw materials.