摘要
设计了一种用于大型环模设备的DN1250自屏蔽制冷机低温泵,低温泵采用4个小型制冷机作为冷源,避免了液氮的使用.详细介绍该低温泵的工作原理、主要结构、设计方法,以及基于流量法的低温泵性能测试方法.测试结果表明,该系列低温泵对氮气的抽速达到57 000 L/s、降温时间小于300 min、渡越容量达到3.0×10~5Pa·L.低温泵目前已经应用在新卫星平台大型高真空检漏系统中,低温泵的各项指标均完全满足要求.
A self-sliield refrigerator cryopump （ DN1250） used in large space environment simulatorcryopump was cooled by using four closed cycle helium refrigerators, where no liquid nitrogen introduces the working principle, primary structure and design method of this cryopump, as well as performance test method of cryopump based on flow method. The results of the test show that the pumping speed for N of the pump is up to 57 000 L/s, cooling down time less than 300 min and the crossover value over 3. 0 ×10^5Pa·L. Currently, cryopumpsare used in large-scale high vacuum leaking detecting systems, and all of their indexes c
出处
《南京工程学院学报（自然科学版）》
2017年第4期32-35,共4页
Journal of Nanjing Institute of Technology(Natural Science Edition)
基金
国家自然科学基金项目(51575018)
关键词
低温泵
抽速
降温时间
渡越容量
＆ cryopump
pumping speed
cool down time
crossover value
