基于高斯脉冲激光空间分辨测量光学元件表面激光损伤阈值研究

Study on Laser Damage Threshold of Optical Element Surface Based on Gaussian Pulsed Laser Spatial Resolution

提出一种基于高斯脉冲激光空间分辨测量光学元件表面激光损伤阈值的方法。通过设定激光能量密度差对高斯光斑进行能量密度分区,统计并分析每个能量密度分区的能量密度以及损伤密度分布,设定一个零损伤密度所对应的激光能量密度作为所测样品的激光损伤阈值。同时利用国际标准1-on-1激光损伤阈值测试方法对同一样品进行激光损伤阈值测试,并将两种测试方法获得的损伤阈值进行了比较分析,证明基于高斯脉冲激光空间分辨的激光损伤阈值测试方法,解决了国际标准1-on-1激光损伤阈值测试中将高斯光斑内空间能量密度以及损伤点的不均匀分布等效地视作均匀分布所带来的问题。

A method to measure the laser damage threshold of optical component surface based on Gaussian pulsed laser spatial resolution is proposed. The energy density partition is performed on the Gaussian spot by setting the laser energy density difference. By analyzing the energy distribution of the Gaussian pulse laser spot and the distribution of the damage point, a laser energy density with zero damage density is obtained as the laser damage threshold of the measured element. At the same time, the international standard 1-on-1 laser damage threshold test method will be used to measure the surface damage threshold at the same sample. And the damage thresholds obtained by the two methods are compared and analyzed. It is proved that the laser damage threshold method based on Gaussian pulsed laser spatial resolution is used to solve the problem that the energy density of the space in the Gaussian spot and the inhomogeneous distribution of the damage point are regarded as uniform distribution in the international standard 1-on-1 laser damage threshold test.