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Optical properties of titanium oxide films obtained by cathodic arc plasma deposition 被引量:1

Optical properties of titanium oxide films obtained by cathodic arc plasma deposition
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摘要 Structural and optical properties of nanometric titanium oxide(TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscopy showed the presence of anatase, rutile, Ti_2O_3, Ti_4O_7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet–visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined. Structural and optical properties of nanometric titanium oxide(TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscopy showed the presence of anatase, rutile, Ti_2O_3, Ti_4O_7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet–visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.
出处 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第12期111-118,共8页 等离子体科学和技术(英文版)
基金 by the Ministry of Education,Science and Technological Development of the Republic of Serbia(grant 172026) COST action MP1306
关键词 optical materials plasma deposition thin films ellipsometry optical materials plasma deposition thin films ellipsometry
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