期刊文献+

中阶梯衍射光栅厚铝膜硬度研究 被引量:2

Characterization hardness study for diffraction grating aluminum film
下载PDF
导出
摘要 铝薄膜硬度对机械刻制中阶梯母光栅质量影响显著,常采用纳米压入方法进行硬度测试。由于薄膜"三明治"式复合结构,进一步增加薄膜硬度表征的困难。为探究光栅厚铝薄膜的硬度特性,对其做浅压深和大压深纳米压痕实验,基于Nix-Gao模型和压痕功法,进行实验数据拟合与分析。结果显示,衍射光栅铝膜的本征硬度为0.480 6 GPa,浅压深拟合得到的尺度效应特征长度为0.38μm,大压深拟合得到的尺度效应长度为2.22μm,此研究揭示出基底存在尺度效应,为中阶梯衍射光栅厚铝膜的硬度研究提供参考和指导。 Effect of aluminum film hardness on the mechanical engraving echelle grating quality is pretty significant, the nanoindentation hardness test method is often used. Owing to the film sandwich structure, the difficulty of characterization of film hardness is further increased. In order to study the hardness of the diffraction grating aluminum film, the hardness of the thin film is measured by shallow pressure and deep indentation. Based on the Nix-Gao model and the work of indentation method, fit the experimental data. The results show that the intrinsic hardness of the diffraction grating aluminum film is 0. 480 6 GPa, the scale effect of shallow pressure deep is about 0.38 μm, and the scale effect length is 2.22 μm. This study reveals the scale effect of the substrate and provides reference and guidance for the hardness study of echelle diffraction grating thick aluminum film.
作者 张宝庆 王占鹏 高劲松 ZHANG Baoqing;WANG Zhanpeng;GAO Jinsong(Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, CHN;School of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130022, CHN)
出处 《制造技术与机床》 北大核心 2018年第2期96-99,共4页 Manufacturing Technology & Machine Tool
基金 国家自然科学基金项目(51405031 51575057 51075042) 吉林省自然科学基金项目(20150101023JC) 吉林省教育厅"十三五"科学技术研究项目(KYC-JC-XM-2016-030)
关键词 衍射光栅 铝膜 基底 硬度 尺度效应 diffraction grating aluminum film substrate hardness size effect
  • 相关文献

参考文献3

二级参考文献28

  • 1李英海.超精密金刚石刀具──衍射光栅刻划刀[J].光学精密工程,1996,4(3):81-84. 被引量:11
  • 2章锦华,陈冬.金刚石车刀的设计与刃磨工艺的研究[J].工具技术,1984,18(2):3-8.
  • 3()liver W C, Pharr G M. An improved technique for deter- mining hardness and elastic modulus using load and displace- ment sensing indentation experiments [J]. J Mater Res, 1992,7:1564.
  • 4Doerner M F, Gardner D S, Nix W D. Plastic properties of thin films on substrates as measured by submicron indenta- tion hardness and substrate curvature techniques[J]. J Mater Res, 1986,1 : 845.
  • 5King R B. Elastic analysis of some punch problems for a layered medium[J]. Int J Solids Struct, 1987,23 : 1657.
  • 6Raniana Saha, William D Nix. Effects of the substrate on the determination of thin film mechanical properties by nanoindentation[J]. Acta Mater,2002,50: 23.
  • 7Seung Min Han, Shah R, Banerjee R, et al. Combinatorial studies of mechanical properties of Ti-A1 thin films using nanoindentation[J]. Acta Mater, 2005,53 : 2059.
  • 8Seung Min Han, Ranjana Saha, William D Nix. Determining hardness of thin films in elastically mismatched film-on-substrate systems using nanoindentation[J]. Acta Mater,2006, 54:571.
  • 9Chen J, Bull S J. Assessment of the toughness of thin coa- tings using nanoindentation under displacement control [J]. Thin Solid Films, 2006,494: 1.
  • 10Chen J, Bull S J. Loading rate effects on the fracture behaviour of solar control coatings during nanoindentation [J ]. Thin Solid Films, 2007,516 : 128.

共引文献24

同被引文献9

引证文献2

二级引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部