中阶梯衍射光栅厚铝膜硬度研究

Characterization hardness study for diffraction grating aluminum film

铝薄膜硬度对机械刻制中阶梯母光栅质量影响显著,常采用纳米压入方法进行硬度测试。由于薄膜"三明治"式复合结构,进一步增加薄膜硬度表征的困难。为探究光栅厚铝薄膜的硬度特性,对其做浅压深和大压深纳米压痕实验,基于Nix-Gao模型和压痕功法,进行实验数据拟合与分析。结果显示,衍射光栅铝膜的本征硬度为0.480 6 GPa,浅压深拟合得到的尺度效应特征长度为0.38μm,大压深拟合得到的尺度效应长度为2.22μm,此研究揭示出基底存在尺度效应,为中阶梯衍射光栅厚铝膜的硬度研究提供参考和指导。

Effect of aluminum film hardness on the mechanical engraving echelle grating quality is pretty significant, the nanoindentation hardness test method is often used. Owing to the film sandwich structure, the difficulty of characterization of film hardness is further increased. In order to study the hardness of the diffraction grating aluminum film, the hardness of the thin film is measured by shallow pressure and deep indentation. Based on the Nix-Gao model and the work of indentation method, fit the experimental data. The results show that the intrinsic hardness of the diffraction grating aluminum film is 0. 480 6 GPa, the scale effect of shallow pressure deep is about 0.38 μm, and the scale effect length is 2.22 μm. This study reveals the scale effect of the substrate and provides reference and guidance for the hardness study of echelle diffraction grating thick aluminum film.