微腔结构介质阻挡放电的仿真与实验研究

Simulation and Experimental Study of Microcavity Dielectric Barrier Discharge

为了深入研究微腔结构介质阻挡放电(MDBD)的放电机理,搭建了基于介质板表面网格微结构电极装置的实验平台。在分析MDBD微放电过程的基础上,提出了基于电压控制电流源(VCCS)的等效电路来模拟MDBD微放电气隙的动态变化。利用Matlab建立动态仿真模型,并对MDBD的放电特性进行仿真,得到了MDBD放电时的电压电流波形和Lissajous图形。同时,对MDBD的放电特性进行实验研究,并将仿真与实验结果进行对比,验证了MDBD动态仿真模型的准确性。进而利用仿真模型分析计算了不同电压幅值下平均放电功率和放电通道传输电荷量,结果表明,通过仿真计算和实验测量得到的结果及其变化规律是一致的。

In order to study the discharge mechanism of microcavity dielectric barrier discharge（ MDBD）, an experimental platform based on the micro electrode device is developed. Based on the analysis of MDBD micro discharge process, an equivalent circuit based on voltage controlled current source（ VCCS） was proposed to simulate the dynamic changes of MDBD microdischarge. The dynamic simulation model was established by Matlab and the discharge characteristics of MDBD were simulated. The voltage and current waveforms and Lissajous figures of MDBD discharge were obtained. At the same time, the discharge characteristics of MDBD were experimentally studied, and the simulation results were compared with the experimental results to verify the accuracy of MDBD dynamic simulation model. Then, the average discharge power and the amount of charge transferred by the discharge channel at different voltage amplitudes were calculated and analyzed by using the simulation model. The results show that the simulation results are consistent with the experimental results.