偏压溅射对蒸镀涤纶织物薄膜-衬底界面性能的影响

Influence of Bias Sputtering on Film and Substrate Interface Properties of Evaporation Polyester Fabric

利用偏压溅射对涤纶织物进行表面改性,研究改性前后表面润湿性能变化及蒸镀薄膜在衬底上的黏附情况,并设计正交试验对工艺参数进行优化。通过扫描电子显微镜、全反射红外光谱和X射线光电子能谱表征涤纶表面微观形貌和化学组成变化。结果表明:影响偏压溅射效果的主次因素分别为处理时间、氩气流量、处理功率、占空比,综合试验考虑的最佳工艺为10min、80mL/min、100W、70%。偏压溅射后涤纶表面非极性基团减少,表面润湿性能明显提高,蒸镀薄膜与衬底之间的黏附提高近一倍。

The surface of polyester fabric was modified by bias sputtering.The wettability of fabric and the adhesion between evaporating film and substrate before and after surface modification were investigated.The orthogonal experiment was designed to optimize process parameters.The surface microtopography and chemical composition of fabric were evaluated by Scanning Electron Microscopy, Total Reflection Infrared Spectroscopy and X-ray Photoelectron Spectrometer.The results show that the primary and secondary factors influencing bias sputtering are time,flow of Ar,power and duty ratio in turn.The optimum processing parameters are as follows:10 min,80 mL/min,100 W,70%.After bias sputtering,the nonpolar groups on the surface of the polyester reduce,the surface wettability increases obviously and the adhesion between the film and substrate almost increases double.