TC4钛合金表面沉积CrSiN/SiN纳米多层膜在3.5%NaCl溶液中的腐蚀磨损性能

Wear Corrosion Resistance of CrSiN/SiN Nano-multilayer Coatings Deposited on TC4 Titanium Alloy in 3.5%NaCl Solution

为了研究纳米多层膜的耐腐蚀性能以及腐蚀磨损机理,采用离子源辅助磁控溅射在TC4钛合金表面制备不同调制周期的CrSiN/SiN纳米多层膜。使用扫描电子显微电镜、能谱仪表征涂层的微观结构、腐蚀形貌以及元素分布;使用划痕仪、纳米压痕仪、维氏硬度计测量涂层的膜基结合力、硬度、弹性模量及断裂韧性,采用电化学工作站以及销盘磨损仪测量涂层耐腐蚀性和腐蚀磨损性。结果表明:调制周期为90 nm与360 nm时涂层耐腐蚀性能较好,腐蚀电流密度分别为1.31×10^(-8)A·cm^(-2)和1.20×10^(-8)A·cm^(-2)。此外,调制周期为45nm时,涂层硬度及弹性模量最大,分别为(22.5±0.6)GPa和(226.4±6.3)GPa,且腐蚀磨损率最低,为9.67×10^(-7)mm^3·N^(-1)·m^(-1)。多层膜结构显著改善了TC4钛合金的耐腐蚀及腐蚀磨损性能。

In order to study the corrosion resistance and corrosion wear mechanism of nano-multilayer coatings, CrSiN/SiN nano- multilayer coatings with different modulation periods were deposited on the titanium alloy surface by ion source assisted magnetron sputtering. The microstructure, corrosion wear track morphology and surface element distribution were characterized with SEM and EDS. The adhesion, hardness, elastic modulus and toughness were measured with scratch tester, nano indentation measurement and Vickers indentation tester tester were used to measure the corrosion resistance. The results Besides, the electrochemical workstation and pin on disc wear show that coatings with modulation period of 90 nm and 360 nm have the positive performance, and the corrosion current density is 1.31 ×10^-8A·cm^-2 and 1.20× 10^-8A·cm^-2, respectively. Additionally, the coating with 45 nm modulation period owns the maximum hardness （22.5±0.6） GPa and elastic modulus （226.4±6.3） GPa. Moreover, the corrosive wear rate of the coating is the lowest, 9.67 × 10^-7 mm^3.N^-1.m^-1. Nano-multilayer coatings significantly improve the corrosion resistance and corrosion wear resistance of TC4 titanium alloy.