摘要
In this paper, in order to design a fast steering mirror(FSM) with large deflection angle and high linearity, a deflection angle detecting system(DADS) using quadrant detector(QD) is developed. And the mathematical model describing DADS is established by analyzing the principle of position detecting and error characteristics of QD. Based on this mathematical model, the variation tendencies of deflection angle and linearity of FSM are simulated. Then, by changing the parameters of the DADS, the optimization of deflection angle and linearity of FSM is demonstrated. Finally, a QD-based FSM is designed based on this method, which achieves ±2° deflection angle and 0.72% and 0.68% linearity along x and y axis, respectively. Moreover, this method will be beneficial to the design of large deflection angle and high linearity FSM.
In this paper, in order to design a fast steering mirror（FSM） with large deflection angle and high linearity, a deflection angle detecting system（DADS） using quadrant detector（QD） is developed. And the mathematical model describing DADS is established by analyzing the principle of position detecting and error characteristics of QD. Based on this mathematical model, the variation tendencies of deflection angle and linearity of FSM are simulated. Then, by changing the parameters of the DADS, the optimization of deflection angle and linearity of FSM is demonstrated. Finally, a QD-based FSM is designed based on this method, which achieves ±2° deflection angle and 0.72% and 0.68% linearity along x and y axis, respectively. Moreover, this method will be beneficial to the design of large deflection angle and high linearity FSM.
基金
supported by the National Natural Science Foundation of China(No.51605465)
