卫星用高精度压力传感器研究

Research on High Precision Pressure Sensor Used in Satellite

针对卫星用压阻式压力传感器存在温度漂移误差的问题,提出在传感器内部压力芯片处嵌入高精度温度传感器,使传感器具备压力、温度一体化测量和标定的功能。通过曲面拟合,采用最小二乘法完成对压力传感器的标定补偿工作,将压力传感器的测量精度提高到0.041 8%。

In order to solve temperature drift error of the piezoresistive pressure sensor used on satellite application,high-pre-cision temperature sensor embedded at the pressure chip was proposed,so that the piezoresistive pressure sensor has the ability ofpressure / temperature integrate measurement and calibration. The curve surface fitting method by using the least-square methodwas used to complete calibration compensated work of the pressure sensor,which increased the pressure sensor measurement ac-curacy to 0.041 8%.