TiAlN,CrAlN和TiCrN涂层的制备及摩擦学性能研究

Preparation and Tribological Properties of TiAlN,CrAlN and TiCrN Coatings

运用直流和射频磁控共溅射的方法制备TiAlN、CrAlN和TiCrN3种涂层,研究涂层的力学性能及在空气和水基切削液中的摩擦学性能,揭示其磨损机制。研究发现,Al元素主要以固溶体形式存在于TiAlN和CrAlN涂层内;3种涂层的显微硬度分别为HV719.3、HV1022.5和HV973.5。在空气中TiAlN、CrAlN和TiCrN涂层与SUS440C钢球对摩的稳态摩擦因数分别为1.25、1.14和1.31,TiAlN和CrAlN涂层的磨损机制主要是氧化磨损,而CrTiN涂层以磨粒磨损为主;而在水基切削液中3种涂层与SUS440C钢球对摩的摩擦因数明显降低,其对应的稳态摩擦因数分别为0.44、0.47和0.77,但磨痕上的划痕加剧,其磨损机制以磨粒磨损为主。

TiA1N, CrA1N and TiCrN coatings were prepared by using DC and RF magnetron co-sputtering system. The mechanical properties of the coatings and their tribological properties in air and in water based cutting fluids were investi- gated, and the wear mechanisms were also revealed.It is found that the A1 elements exist in TiA1N and CrA1N coatings in the form of solid solution.The corresponding microhardness of the three coatings are HV719.3, HV1022.5 and HV973.5 respectively.The steady-state friction coefficient of three coatings sling against SUS440C steel balls is 1.25,1.14 and 1.31 in air, respectively, and the wear mechanisms of TiA1N and CrA1N coatings are mainly oxidation wear, while the wear mech- anisms of CrTiN coating mainly is abrasive wear.The friction coefficient in water based cutting fluid is obviously reduced, and the steady friction coefficient was 0. 44,0. 47 and 0. 77 respectively, whilst the scratches on the wear scars are intensi- fied, therefore the corresponding wear mechanism is mainly abrasive wear.