双光子聚合加工系统的误差建模及辨识

Error Modeling and Identification of Two-Photon Polymerization Processing System

双光子聚合加工技术可实现大面积超材料快速结构化加工,双光子聚合加工系统中存在的误差是影响加工精度的重要因素之一。系统误差的来源以及系统误差的辨识分析是实现误差补偿,提高加工精度的重要前提。为了研究加工系统的各个组成部分的误差项及系统误差的主要来源,对系统误差进行辨识分析,从而建立双光子聚合加工系统的误差模型,并搭建实验测量系统,对微动台的几何误差进行测量,包括定位误差与直线度误差,然后采用改进九线辨识法对其它几何参数进行辨识,得到了加工系统的各项几何误差参数。对加工系统的误差项及其主要来源分析,可知系统的几何误差对加工精度的影响最大,同时对其误差参数进行辨识,对提高加工精度有重要意义。

Two-photon polymerization processing technologycan realize large area metamaterials fast structured processing,and the error in the two-photon polymerization processing system is one of the important factors that affect the machining precision.The source of the system error and the identification and analysis of the system error are the important precondition to realize the error compensation and improve the machining precision. In order to research processing system of the various components of the error and system error of main source,the system error identification analysis,so as to establish the twophoton polymerization processing system error model,and set up the experimental measurement system,micro geometric errors are measured,including the location error and the straightness error. Then the improved nine line identification method to identify the other geometric parameters,the processing system of the geometric error parameters. The error terms and main source of the machining system are analyzed. It can be known that the geometric error of the system has the greatest influence on the machining accuracy,and the error parameters are identified,which is important to improve the machining accuracy.