金属反射镜超精密加工研究进展

Review on Ultra-Precision Machining of Metal Reflector

金属反射镜已经成为光学系统主反射镜的发展方向和趋势,金属反射镜的超精密加工已经成为当代科技前沿的关键支撑技术。主要对国内外金属反射镜超精密加工研究进展进行综合评述。评述了单点金刚石车削、光学冷加工、复制法对面形精度和光学性能的影响,从材料方面研究了材料物理特性、工件表面镀层和快速冷凝制造合金对超精密加工表面质量和光学性能的影响。最后对这些加工方法分析对比优缺点,并对金属反射镜超精密加工的技术发展愿景进行了展望。

Metal reflector has become the development direction and trendency of the primary mirror in optical system,the ultra precision machining for metal reflector has become the key supporting technology of contemporary technological frontier. The research progress of ultra-precision machining of metal reflector was reviewed comprehensively in this paper. The form accuracy and optical performance of metal reflectors machined by different processes（ such as the single point diamond turning,the optical cold machining,and the duplication） were reviewed. At the same time,the surface quality and optical performance of metal reflectors were reviewed from the aspects of material physical properties,surface coating and rapid condensation alloys.Finally,the advantages and disadvantages of the said techniques were analyzed and prospective technique was proposed.