锆合金表面TiAlN和TiAlSiN涂层微观形貌和性能的研究

Research on Micromorphology and Performance of TiAlN Coating and TiAlSiN Coating on Zirconium Alloy Surface

对Zr-4合金表面分别进行多弧离子镀TiAlSiN涂层和TiAlN涂层。利用扫描电镜对涂层进行表面微观形貌观察;利用ImageJ对涂层大颗粒分布进行统计和分析;利用X射线衍射仪对涂层进行物相分析;利用自动划痕仪对涂层的力学性能进行检测;利用高温热处理炉对涂层试样进行800℃高温抗氧化实验。结果表明:TiAlSiN涂层表面的大颗粒数较TiAlN涂层的少。TiAlSiN涂层中除了与TiAlN涂层共同拥有的Ti_2N、Ti_3AlN物相外,还生成了AlN物相和非晶相Si_3N_4。由于Si元素的加入引起残余应力,TiAlSiN涂层的膜基结合力低于TiAlN涂层。TiAlSiN涂层试样的氧化增重远低于TiAlN涂层的氧化增重。

TiAlSiN coating and TiAlN coating were deposited on Zr-4 alloy surface by multi-arc ion plating,respectively.Surface micromorphology of the coatings were observed by scanning electron microscope.Statistics and analysis of the large particle distribution of the coatings were carried out by ImageJ.The phase composition of the coatings was analyzed by X-ray diffractometer.The mechanical properties of the coatings were tested by an automatic scratch tester.And the samples were subjected to 800℃ high temperature oxidation resistance test in a high temperature heat treatment furnace.The results show that the amount of large particles on the surface of TiAlSiN coating is less than that of TiAlN coating.Both TiAlSiN coating and TiAlN coating have Ti2N phase and Ti3AlN phase.In addition,TiAlSiN coating also has AlN phase and Si3N4 amorphous phase.Because the addition of Si elements leads to residual stress,TiAlSiN coating has lower coating/substrate adhesion strength than TiAlN coating.Oxidation weight gain of TiAlSiN coating sample is far lower than that of TiAlN coating sample.