摘要
This special issue in Frontiers of Mechanical Engineering contains twelve papers contributed by international prestigious groups in micro-electromechanical systems （MEMS） research area, including four research papers, seven review papers, and one short communication. These papers cover the latest advances of structure design, micro-nanofabricating technologies and the exciting applications with MEMS. Some interesting fabrication methods such as self-assembly and thermal shrinking, electrohydrodynamic jet and direct-write methods are presented, and the extended applications in wireless, bio and biochemical, medical equipment, energy storage, flexible and aerospace systems are comprehensively reviewed to provide readers with a clear picture of the latest MEMS development.
This special issue in Frontiers of Mechanical Engineering contains twelve papers contributed by international prestigious groups in micro-electromechanical systems （MEMS） research area, including four research papers, seven review papers, and one short communication. These papers cover the latest advances of structure design, micro-nanofabricating technologies and the exciting applications with MEMS. Some interesting fabrication methods such as self-assembly and thermal shrinking, electrohydrodynamic jet and direct-write methods are presented, and the extended applications in wireless, bio and biochemical, medical equipment, energy storage, flexible and aerospace systems are comprehensively reviewed to provide readers with a clear picture of the latest MEMS development.
