摘要
为了实现多轴加速度检测,设计了一种新型双轴电容式加速度传感器。由内、外2个质量块组成,分别由4组折叠梁支撑。传感器通过固定梳齿和活动梳齿之间的距离变化引起两者电容值发生变化,最终测得加速度。通过ANSYS仿真分析得出:传感器的位移灵敏度为0.084 5μm/g_n(X轴)和0.138 1μm/g_n(Y轴)。结构的一~三阶谐振频率分别为1.34,1.71,14.48 kHz。由于各阶模态频率相差很大,避免了跨轴信号的干扰。
In order to realize detection of multi-axis acceleration,a new type of dual-axis capacitive acceleration sensor is designed. The structure is composed of an inner and an outer mass block,and the structure is respectively supported by four groups of folding beams. The movement of mass changes the gap between the fixed and active fingers,thereby leading to the variation of capacitance. ANSYS simulation analysis shows that the displacement sensitivity of the sensor is 0. 084 5 μm/g_n（ for X axis） and 0. 1381 μm/g_n（ for Y axis）. In addition,the first three resonant frequencies of the structure are 1. 34 kHz,1. 71 kHz and 14. 48 kHz,respectively. Because each order modal frequency has great difference,so interference of cross shaft signal can be avoided.
出处
《传感器与微系统》
CSCD
2018年第2期83-85,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金国际(地区)合作交流资助项目(61411136003)
关键词
双轴
电容式
加速度传感器
dual-axis
capacitive type
acceleration sensor
