静电驱动MEMS柔性结构的变形分析与试验验证

Deformation analysis and experimental of the MEMS flexible structure driven by electrostatic force

针对静电驱动MEMS柔性梁的变形特性进行分析,依据静电场理论及伪刚体理论,考虑静电力非均匀分布载荷的基本特征、静电力与柔性梁变形之间的耦合作用及可能存在的边缘电场对静电力的影响,建立不同电压下求解柔性梁变形的数学模型,同时给出静电吸合电压的计算式。设计并加工了MEMS柔性梁,采用文中所建模型计算了柔性梁的变形,同时搭建试验测试系统测试柔性梁的变形及静电吸合电压,与理论计算结果具有较好的一致性,验证了文中建立的数学模型的正确性。

Based on the electrostatic and the pseudo-rigid-body theory, and the non-uniformly distributed load of the electrostatic force, the coupling between the electrostatic force and the deformation and the effect of the edge electric field are considered, deformation characteristic of MEMS flexible beam driven by static electricity is analyzed. The model used for calculating the deformation under different driven voltage is established, the formula of the pull-in voltage is proposed. The flexible beam is designed and machined, and its deformation is analyzed with the above model. The test system is built and the driven voltage range is determined, the deformation of the flexible beam under different driven voltage and the pull-in voltage are tested. By contrasting the theoretical calculation and the test results, the correctness of the analysis method and the mathematical models are proved.