一种MEMS可重构群时延均衡器的设计

Design of a MEMS Reconfigurable Group Delay Equalizer

为了改善相控阵天线系统T/R组件间群时延特性差异,降低群时延对系统合成信噪比的影响,对群时延补偿均衡网络进行了研究。在全通网络理论基础上,根据系统可重构需求,提出了一种新型可重构的网络拓扑结构,利用可调元件解决了群时延调整问题;提出了利用微机电系统(MEMS)工艺技术,在硅基上制造可调高Q值电感、电容的思路。以某S频段相控阵系统为例,统计了组件射频通道群时延特性差异,利用新型拓扑网络结构,设计了群时延均衡单元。软件仿真表明:均衡单元谐振频率调节范围达到450 MHz,群时延大小可调范围可达20 ns以上,指标满足系统对群时延均衡网络的要求。

In order to improve the group delay difference between the T / R modules of phased array antenna system and reduce theinfluence of group delay on the signal-to-noise ratio,a group delay compensation network is studied. Based on the theory of all-pass network,according to the reconfiguration demand of the system,a new type of reconfigurable network topology is proposed. The problem of group delay adjustment is solved by using variable elements. The idea of using Micro-Electro-Mechanical Systems （MEMS） technique to manufacture variable components on silicon substrate is proposed. Taking an S-band phased array system as an example, the difference of group delay is statistically analyzed. With the new topology network structure,a group delay equalization unit is designed.The software simulation shows that the adjustment range of the resonance frequency reaches up to 450 MHz and the adjustable range of the group delay amplitude is more than 20 ns. The specifications meet the system requirement for the group delay network.