5Thielsch R, Gatto A, Kaiser N. Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region. Appl Opt, 2002, 41(16): 3211-3217.
6Finegan J D, Hoffman R W. Stress anisotropy in evaporated iron films. Appl Phys , 1959, (30): 597.
7Hoffman D W, Thormon J A. Compressive stress and inert gas in Mo films sputtered from a cylindrical-post magnetron with Ne, At, Kr, and Xe J Vac Sci Technol , 1980, 17(1): 380-383.
8Cuomo J J, Harper J M E, Guarnieri C R. Modification of niobium film stress by low-energy ion bombardment during deposition. Vac Sci Technol , 1982, 20:349-354.
9Knoll R W, Bradeley E R. Correlation between the stress and microstructure in bias-sputtered ZrO2-Y2O3 films. Thin Solid Films, 1984, 117:201-210.
10Birnie J, Craggs C, Gardiner D J et al. Ex situ and in situ determination of stress distributions in chromium oxide films by raman microscopy. Corrossion Science, 1992, 33(1): 1-12.