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Enhanced radiation-induced narrow channel effects in 0.13-μm PDSOI nMOSFETs with shallow trench isolation

Enhanced radiation-induced narrow channel effects in 0.13-μm PDSOI nMOSFETs with shallow trench isolation
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摘要 Total ionizing dose responses of different transistor geometries after being irradiated by ^(60)Co γ-rays, in 0.13-μm partially-depleted silicon-on-insulator(PD SOI) technology are investigated. The negative threshold voltage shift in an n-type metal-oxide semiconductor field effect transistor(nMOSFET) is inversely proportional to the channel width due to radiation-induced charges trapped in trench oxide, which is called the radiation-induced narrow channel effect(RINCE).The analysis based on a charge sharing model and three-dimensional technology computer aided design(TCAD) simulations demonstrate that phenomenon. The radiation-induced leakage currents under different drain biases are also discussed in detail. Total ionizing dose responses of different transistor geometries after being irradiated by ^(60)Co γ-rays, in 0.13-μm partially-depleted silicon-on-insulator(PD SOI) technology are investigated. The negative threshold voltage shift in an n-type metal-oxide semiconductor field effect transistor(nMOSFET) is inversely proportional to the channel width due to radiation-induced charges trapped in trench oxide, which is called the radiation-induced narrow channel effect(RINCE).The analysis based on a charge sharing model and three-dimensional technology computer aided design(TCAD) simulations demonstrate that phenomenon. The radiation-induced leakage currents under different drain biases are also discussed in detail.
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第2期619-624,共6页 中国物理B(英文版)
基金 Project supported by the Weapon Equipment Pre-Research Foundation of China(Grant No.9140A11020114ZK34147) the Shanghai Municipal Natural Science Foundation,China(Grant No.15ZR1447100)
关键词 partiallydepleted silicon-on-insulator(PD SOI) totalionizingdose(TID) radiationinduced narrow channel effect(RINCE) drain induced barrier lowering(DIBL) effect partiallydepleted silicon-on-insulator(PD SOI) totalionizingdose(TID) radiationinduced narrow channel effect(RINCE) drain induced barrier lowering(DIBL) effect
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