基于染料聚合物工艺的母盘刻录技术

Introduction of mastering technology using dye-polymer materials

母盘刻录是光盘制作流程中的关键环节。目前在CD/DVD实际生产中普遍采用的母盘刻录工艺主要有两种:一种是基于光刻胶(Photo-Resist)工艺的母盘刻录,它被众多设备商采用;另一种是基于染料聚合物(Dye-Polymer)工艺的母盘刻录,它被美国ODC(Optical Disc Corporation)等少数公司采用。

An introduction of mastering technology using dye-polymer material is presented. This mastering method is based on the principle of dye-polymer ablation induced by thermal effect. It has less steps during stamper fabrication process than that of photo-resist mastering. Especially, DRAW (Direct Read After Writing)technology makes real-time inspection and feedback available, and write strategy is adopted to optimize the pits geometry and final readout signal.