摘要
报道了所建立的半导体光电压谱自动测量系统的结构、联机方法和工作原理。与手动测量方式相比，可提高测量效率２０多倍。应用该系统测量了ＧｅｘＳｉ１－ｘ／Ｓｉ应变层超晶格在不同温度下（１８～３００Ｋ）的光电压特性。
The structure,the linking method and the working principle of the automatic measurement system for semiconductor photovoltage spectrum have been reported.This system increases the measuring efficiency 20 times in comparison with a manual system,and is also used to study the photovoltaic properties of GexSi1-x/Si strained-layer superlattices at different temperatures ranging from 18 K to 300 K.
基金
福建省自然科学基金
关键词
光电压谱
自动测量
超晶格
半导体
photovoltage spectrum
automatic measurement
superlattece
semiconductor
